Design and Error Compensation Performance of a Precision Micro-Drive Rotary System

Figure 1

The micro-drive rotary system. (a) Schematic diagram of the micro-drive rotary system. (b) Picture of the micro-drive rotary system. (1) The micro rotary mechanism. (2) Gasket. (3) PZT (piezoelectric actuator). (4) Fixing sleeve.

(a)

(b)