Design and Error Compensation Performance of a Precision Micro-Drive Rotary System

Figure 10

Compensation performance test diagram of the fretting rotary system. (1) PZT. (2) MirrorI. (3) Calibration shaft. (4) Mirror II. (5) Fixed clamp. (6) Experiment box. (7) Control system of PMAC. (8) Computer. (9) Diver of direct drive motor. (10) Dual-frequency laser interferometer. (11) Vibration isolation.