Design and Error Compensation Performance of a Precision Micro-Drive Rotary System

Table 1

Main parameters of the P235.1S PZT.

Index	Parameter
Length	55 mm
Cylinder diameter	49.8 mm
Closed-loop travel	15 μm
Resolution	0.3 nm
Linearity	0.2%
Static large-signal stiffness	860 N/m
Operating voltage	0–10 V
Maximum push	30000 N
Maximum pull	3500 N
Shear force limit	707 N
Torque limit	2 Nm
Maximum motion frequency	300 Hz