Research Article

Design of Harmonic AFM Probe Subjected to van der Waals Force in the Modified Couple Stress Theory

Figure 6

Effect of the tip-sample distance on the deviation of integer multiples of frequencies (SiO2: E = 70.3 × 109 Pa, ρ = 2.5 × 103 kg/m3, b = 45 μm, h = 3.5 μm, L = 200 μm, , , ξ1 = 0.3, ξ2 = 0.6, , ).