Nonlinear Contour Tracking of a Voice Coil Motors-Driven Dual-Axis Positioning Stage Using Fuzzy Fractional PID Control with Variable Orders

Table 1

Specifications of the adopted VCMs.

Specifications	Value	Unit
Diameter	40	mm
Stroke	20	mm
Force-current coefficient	12.90	N/A
Back electromotive force constant	12.90	V/m/s
Continuous force	9.93	N
Peak force	58.05	N
Continuous current	0.77	A
Peak current	4.5	A
Continuous power	7.17	W
Coil assembly mass	67.0	g
Core assembly mass	226.2	g