Research Article

Nonlinear Contour Tracking of a Voice Coil Motors-Driven Dual-Axis Positioning Stage Using Fuzzy Fractional PID Control with Variable Orders

Table 5

Contour tracking performance measures of Case 2.

ControllersCommands
Flower contour (mm)Window contour (mm)
TMTATSTMTATS

PID0.39730.13120.04900.59440.13550.0597
FFPID0.29860.09210.03830.35120.09080.0253
VOFFPID0.27310.06820.02330.30980.05350.0289