Research Article
Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror
Table 2
Maximum position fluctuation under 50 Hz random rotation.
| | Original maximum position fluctuation (μrad) | Maximum position fluctuation when Δ = 20% (μrad) | Maximum position fluctuation when Δ = −20% (μrad) |
| DOB | 55 | 63 | 61 | ARC | 38 | 41 | 42 | NECOD | 29 | 33 | 30 |
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