Research Article

Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror

Table 2

Maximum position fluctuation under 50 Hz random rotation.

Original maximum position fluctuation (μrad)Maximum position fluctuation when Δ = 20% (μrad)Maximum position fluctuation when Δ = −20% (μrad)

DOB556361
ARC384142
NECOD293330