Research Article
Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror
Table 3
Maximum position fluctuation under random vibration.
| | Original maximum position fluctuation (μrad) | Maximum position fluctuation when Δ = 20% (μrad) | Maximum position fluctuation when Δ = −20% (μrad) |
| DOB | 101 | 117 | 115 | ARC | 62 | 66 | 65 | NECOD | 31 | 35 | 32 |
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