Research Article

Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror

Table 3

Maximum position fluctuation under random vibration.

Original maximum position fluctuation (μrad)Maximum position fluctuation when Δ = 20% (μrad)Maximum position fluctuation when Δ = −20% (μrad)

DOB101117115
ARC626665
NECOD313532