Research Article
Two-Stage Hybrid Optimization Algorithm for Silicon Single Crystal Batch Scheduling Problem under Fuzzy Processing Time
Table 7
The production batch allocation results obtained by the TSHOA scheduling.
| | Silicon single crystal furnace size | Device ID | The first batch | The second batch | The third batch | The fourth batch |
| | 22-inch thermal field | | 2 | 3 | 3 | — | | 2 | 3 | 1 | — | | 1 | 1 | 2 | — | | 2 | 2 | 2 | 2 | | 2 | 2 | 2 | 2 |
| | 24-inch thermal field | | 1 | 1 | 1 | — | | 1 | 1 | 1 | — | | 1 | 1 | 3 | — | | 1 | 1 | — | — | | 2 | 1 | 3 | — |
| | 28-inch thermal field | | 1 | 1 | — | — | | 2 | 1 | — | — | | 3 | 1 | — | — | | 1 | 3 | — | — | | 1 | 1 | — | — |
| | 32 inches thermal field | | 4 | 4 | — | — | | 4 | — | — | — | | 4 | — | — | — | | 4 | — | — | — | | 4 | — | — | — |
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