Research Article

Two-Stage Hybrid Optimization Algorithm for Silicon Single Crystal Batch Scheduling Problem under Fuzzy Processing Time

Table 8

The production batch allocation results obtained by the manual scheduling.

Silicon single crystal furnace sizeDevice IDThe first batchThe second batchThe third batchThe fourth batch

22-inch thermal field

24-inch thermal field111
111
111
111
11

28-inch thermal field121
122
1111
1111
121

32-inch thermal field44
44
4
4
4