Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Parameters</td><td class="align_center">Symbols</td><td class="align_center">Values (<i>μ</i>m)</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Top electrode radius</td><td class="align_center"><i>R</i><sub>0</sub></td><td class="align_center">500</td></tr><tr><td class="align_left">Piezoelectric layer and substrate radius</td><td class="align_center"><i>R</i></td><td class="align_center">1000</td></tr><tr><td class="align_left">Top and bottom electrode thickness</td><td class="align_center"><i>d</i><sub>pt</sub></td><td class="align_center">10</td></tr><tr><td class="align_left">Piezoelectric layer thickness</td><td class="align_center"><i>d</i></td><td class="align_center">20</td></tr><tr><td class="align_left">Substrate thickness</td><td class="align_center"><i>d</i><sub>si</sub></td><td class="align_center">100</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Typical geometric parameters for circular pMUT.</div>

Mathematical Problems in Engineering

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Table 1

Table 1: Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT 