Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Table 2

Typical physical parameters for the ultrasonic-solid-pMUT coupling simulation model [18, 19].

Components		Materials	Density (kg/m^3)	Young’s modulus (GPa)	Poisson’s ratio	Relative permittivity
Top and bottom electrodes		Pt	21450	168	0.38	1.0
Substrate		Si	2329	170	0.28	11.7
Piezoelectric layer	Emitter	PZT-4	7500	—	—	[εrS1]
	Receiver	PZT-5				[εrS2]
GIS enclosure		Al	2700	70	0.33	1.0