Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Table 3

Elastic and coupling matrices for piezoelectric layer materials [18].

Parameters	Symbols	PZT-4	PZT-5
	c11	13.9	12.7
	c12	7.78	8.02
	c13	7.43	8.47
	c33	11.5	11.7
	c44	2.56	2.3
	c66	3.06	2.35
	e15	12.72	17.03
	e31	−5.20	−6.62
	e33	15.08	23.24