Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Table 4

The central displacement amplitude (_max) and output voltage amplitude (_max) in acoustic-solid-pMUT coupling simulation for different computational grids.

Grids	Regions	Minimal grid size (μm)	Maximal grid size (μm)	Total grid numbers	max × 10^−3 (μm)	max ()
Grid 1	Zone 1	19.27	142.86	5748	3.02	1.35
	Zone 2	10.01	176.77
	Zone 3	7.59	124.09
Grid 2	Zone 1	19.25	100.00	10717	2.62	1.74
	Zone 2	10.00	118.03
	Zone 3	6.55	124.09
Grid 3	Zone 1	18.11	76.92	17706	2.71	1.82
	Zone 2	10.00	92.25
	Zone 3	6.25	111.62
Grid 4	Zone 1	12.84	62.50	26804	2.75	1.87
	Zone 2	9.84	71.99
	Zone 3	5.87	100.23
Grid 5	Zone 1	11.12	52.63	38426	2.78	1.88
	Zone 2	9.26	61.24
	Zone 3	5.57	60.18