Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Table 5

The inherent frequency (f₀) and effective electromechanical coupling factor () of receiving pMUT for different computational grids.

Grids	Regions	Minimal grid size (μm)	Maximal grid size (μm)	Total grid numbers	f0 (kHz)	(%)
Grid 1	Zone 4	142.49	264.34	8152	314	11.03
	Zone 5	25.79	264.34
	Zone 6	32.41	83.62
Grid 2	Zone 4	51.69	114.61	21253	312	10.96
	Zone 5	24.89	114.61
	Zone 6	23.70	67.25
Grid 3	Zone 4	44.32	100.81	36669	310	10.93
	Zone 5	19.00	100.81
	Zone 6	20.84	51.43
Grid 4	Zone 4	34.34	67.38	55010	310	10.92
	Zone 5	17.09	67.38
	Zone 6	17.59	41.25