Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Table 6

Typical physical properties of different components for the pMUT validation model [15].

Components	Materials	Density (kg/m^3)	Young’s modulus (GPa)	Poisson’s ratio	Relative permittivity
Electrode	Al	2700	70	0.33	1.0
Piezoelectric layer	AlN	3300	—	—	9.0
Substrate	Si	2329	170	0.28	11.7
	SiO2	2200	70	0.17	4.2