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Mathematical Problems in Engineering
/
2023
/
Article
/
Tab 7
/
Research Article
Numerical Study of Acoustic-Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT
Table 7
Comparison of the pMUT inherent frequency for present simulation and experiment results [
15
].
Parameter
Present simulation
Experiment [
15
]
Relative deviation (%)
Inherent frequency (kHz)
402
400
0.5