Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

Figure 8

The topography of a standard grating was imaged with VR mode. (a) The AFM image and a cross-sectional profile at the marked position, and the inset in the black rectangle was the zoom of the small step. (b) 3D view by the VR mode of the step of 100 nm height.

(a)

(b)