Hydrothermal Corrosion of SiC Coupons Suppressed by Magnetron Sputtered Cr Coatings

Table 1

Deposition conditions of Cr coatings.

Target	Cr (99.9%)
Base pressure	~1.010^-5 Pa
Ar pressure	0.7 Pa
Ar gas flow rate	32 SCCM
Revolution speed	12 rmp
Cr target power (MF-DC)	200 W
Radio frequency (RF)	250 W
Substrate bias voltage (DC)	-5 V
Deposition temperature	400 K