Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrN<sub>x</sub> Films Prepared by Reactive DC Magnetron Sputtering

<div>High-resolution XPS spectrum of (a) Zr3d and (b) N1s of the films prepared at different partial pressures of nitrogen.</div>

Scanning

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Figure 1

Figure 1: Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrN<sub>x</sub> Films Prepared by Reactive DC Magnetron Sputtering 

Figure 1 | Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering 