Research Article
Effect of Nitrogen Partial Pressure on Structure, Mechanical Property, and Corrosion Behavior of ZrNx Films Prepared by Reactive DC Magnetron Sputtering
Figure 2
(a, c, e) Typical surface morphology and (b, d, f) cross-section morphology of the ZrNx films deposited with (a, b) , (c, d) , and (e, f) .
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