Hotspot Detection with Machine Learning Based on Pixel-Based Feature Extraction

Figure 6

(a) Width and height of a polygon are both smaller than ; the center of the scan window is set exactly at the center of the pattern. (b) The height of the polygon is larger than , and the polygon is decomposed into two rectangles. (c) After the polygon decomposition, the upper pattern can be directly handled by the pattern checking method. (d) After processing the upper pattern, since the height of the lower pattern is larger than , the scan window starts from the upper side of the pattern and moves to the lower side.

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(b)

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