Hotspot Detection with Machine Learning Based on Pixel-Based Feature Extraction

Table 3

Pattern-based layout scanning results.

Case	Accuracy (%)		False alarm rate		Efficiency (%)
	Raster	Pattern	Raster	Pattern	Raster	Pattern
B1	91.67%	90.71%	101.35	33.45	0.90%	2.71%
B2	34.27%	70.54%	14.08	28.23	2.43%	2.50%
B3	86.37%	96.81%	57.87	120.43	1.49%	0.80%
B4	61.20%	76.04%	90.75	17.71	0.67%	4.29%
B5	59.52%	71.43%	112.83	3.52	0.53%	20.27%
Avg.	0.81	1.00	8.23	1.00	0.67	1.00