Study on Effect of Ultrasonic Vibration on Grinding Force and Surface Quality in Ultrasonic Assisted Micro End Grinding of Silica Glass

Table 3

Parameters of microgrinding experiment.

Ex. number	A (𝜇m)	n (r/min)	𝑎𝑝 (𝜇m)	𝑣𝑤 (𝜇m/s)
1	0	18000	2	100
2	6.5	18000	2	100
3	7.5	18000	2	100
4	8.5	18000	2	100
5	8.5	8000	2	100
6	8.5	27000	2	100
7	8.5	36000	2	100
8	8.5	18000	1.5	100
9	8.5	18000	2.5	100
10	8.5	18000	1	100
11	8.5	18000	1	40
12	8.5	18000	1	70
13	8.5	18000	1	130
14	0	8000	2	100
15	0	27000	2	100
16	0	36000	2	100
17	0	18000	1.5	100
18	0	18000	2.5	100
19	0	18000	1	100
20	0	18000	1	40
21	0	18000	1	70
22	0	18000	1	130