Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td align="left">Parameter</td><td align="center">Symbol</td><td align="center">Value</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td align="left">Damping coefficient</td><td align="center"><span style="width: 7.0250001px;"><svg height="7.9499998" id="M97" style="vertical-align:-0.13794pt" version="1.1" viewbox="0 0 7.0250001 7.9499998" width="7.0250001" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,7.675)"><path d="M383 397q0 -32 -35 -49q-12 -6 -23 8q-37 45 -84 45t-90 -71q-40 -65 -40 -167q0 -57 22 -86t59 -29q38 0 81.5 24.5t69.5 51.5l16 -21q-44 -53 -104 -84t-109 -31q-56 0 -89.5 41t-33.5 117q0 61 30 124t79 105q33 28 81 50.5t86 22.5q34 0 59 -15.5t25 -35.5z" id="x1D450"></path></g>
</svg></span></td><td align="center">0.01</td></tr><tr><td align="left">Voltage amplitude coefficient</td><td align="center"><span style="width: 26.049999px;"><svg height="16.450001" id="M98" style="vertical-align:-3.25793pt" version="1.1" viewbox="0 0 26.049999 16.450001" width="26.049999" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M494 514l-10 -15q-56 76 -106.5 117t-110.5 41q-45 0 -45 -30q0 -28 109 -152q59 -68 86 -118.5t27 -107.5q0 -62 -29.5 -119.5t-86.5 -96.5q-64 -45 -138 -45q-76 0 -121.5 53t-45.5 136q0 74 40.5 135t98.5 95q43 26 87 42q-40 59 -57.5 92t-17.5 62q0 46 39 77.5
t90 31.5q54 0 97.5 -35.5t65 -78.5t28.5 -84zM359 234q0 84 -90 191q-47 -17 -74 -47q-81 -89 -81 -200q0 -71 32.5 -109.5t72.5 -38.5q47 0 80 33t46.5 77.5t13.5 93.5z" id="x1D6FF"></path></g>
<g transform="matrix(.012,-0,0,-.012,10.1,16.25)"><path d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105
q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" id="x30"></path></g><g transform="matrix(.012,-0,0,-.012,15.811,16.25)"><path d="M780 372q0 -191 -178 -297q-128 -75 -335 -75h-250l7 27q61 7 77 22t28 76l77 398q11 62 0 76.5t-77 22.5l6 28h292q164 0 258.5 -67.5t94.5 -210.5zM678 375q0 119 -73 180.5t-201 61.5q-62 0 -82 -13q-17 -7 -25 -53l-80 -427q-8 -47 -4 -62t26 -20q24 -6 80 -6
q166 0 262.5 95t96.5 244z" id="x1D437"></path></g>
</svg></span></td><td align="center">0.001</td></tr><tr><td align="left">Voltage amplitude coefficient</td><td align="center"><span style="width: 25.2125px;"><svg height="16.450001" id="M99" style="vertical-align:-3.25793pt" version="1.1" viewbox="0 0 25.2125 16.450001" width="25.2125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M494 514l-10 -15q-56 76 -106.5 117t-110.5 41q-45 0 -45 -30q0 -28 109 -152q59 -68 86 -118.5t27 -107.5q0 -62 -29.5 -119.5t-86.5 -96.5q-64 -45 -138 -45q-76 0 -121.5 53t-45.5 136q0 74 40.5 135t98.5 95q43 26 87 42q-40 59 -57.5 92t-17.5 62q0 46 39 77.5
t90 31.5q54 0 97.5 -35.5t65 -78.5t28.5 -84zM359 234q0 84 -90 191q-47 -17 -74 -47q-81 -89 -81 -200q0 -71 32.5 -109.5t72.5 -38.5q47 0 80 33t46.5 77.5t13.5 93.5z" id="x1D6FF"></path></g>
<g transform="matrix(.012,-0,0,-.012,10.1,16.25)"><path d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105
q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" id="x30"></path></g><g transform="matrix(.012,-0,0,-.012,15.811,16.25)"><path d="M716 28l-8 -28h-254l8 28q55 5 66 17.5t5 47.5l-30 145h-232l-74 -138q-21 -43 -11 -54.5t72 -17.5l-6 -28h-235l8 28q53 7 73.5 21t53.5 70l319 540l33 8q6 -43 33 -176l80 -381q10 -49 26.5 -63t72.5 -19zM495 281l-49 264h-2l-149 -264h200z" id="x1D434"></path></g>
</svg></span></td><td align="center">0.1</td></tr><tr><td align="left">Fringe coefficient</td><td align="center"><span style="width: 11.0375px;"><svg height="16.6625" id="M100" style="vertical-align:-2.34499pt" version="1.1" viewbox="0 0 11.0375 16.6625" width="11.0375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M619 670q0 -13 -9 -26t-18 -19q-13 -10 -25 2q-36 38 -66 38q-31 0 -54.5 -50t-45.5 -185h120l-20 -31l-107 -12q-23 -138 -57 -293q-27 -122 -55 -184.5t-75 -109.5q-60 -61 -114 -61q-25 0 -47.5 15t-22.5 31q0 17 31 44q11 8 20 -1q10 -11 31 -19t35 -8q26 0 47 19
q34 34 71 253l54 315h-90l-3 12l31 30h70q28 138 90 204q35 37 75 57.5t70 20.5q26 0 45 -14t19 -28z" id="x1D453"></path></g>
</svg></span></td><td align="center">0.26</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Shock and Vibration

tab2

Table 2

Table 2: Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias 