Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process

Table 1

Specifications of the precision stage for the LDI process.

Item	Unit	X-axis	Y-axis
Rated stroke	mm	600	600
Maximum velocity	mm/s	1,000	1,000
Maximum acceleration	G	1.0	1.0
Repeatability	μm	2.0	2.0
Accuracy	μm	3.0	3.0