Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process

<table class="fixed-width table-group" id="tab4"><tr><td><table class="table"><colgroup><col style="width:9.14em"/><col style="width:3.08em"/><col style="width:7.26em"/></colgroup><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Item</td><td class="align_center">Unit</td><td class="align_center">Specification</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Sensing range</td><td class="align_center"><i>μ</i>m</td><td class="align_center">1,000</td></tr><tr><td class="align_left">Bandwidth</td><td class="align_center">Hz</td><td class="align_center">1,000</td></tr><tr><td class="align_left">RMS distance noise</td><td class="align_center">nm</td><td class="align_center">2.90</td></tr><tr><td class="align_left">Resolution</td><td class="align_center">nm</td><td class="align_center">5.70</td></tr><tr><td class="align_left">Output signal</td><td class="align_center">V</td><td class="align_center">±10.0 (Analog)</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Specifications of noncontact displacement sensor (gap sensor).</div>

Shock and Vibration

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Table 4

Table 4: Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process 