Research Article

Multi-DOF Ultrasonic Actuators for Laser Beam Positioning

Table 2

Calculated values of the equivalent contact forces.

(N) (°) (N) (N) (N) (N)

[0, 1]01001
[0.4, 1]

[0, 1]2010.34700.879
[0.4, 1]10.6080.4000.528