Snap-Through and Mechanical Strain Analysis of a MEMS Bistable Vibration Energy Harvester

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="6"><hr/></td></tr><tr class="thead"><td class="align_left">Mode shape</td><td class="align_center">Mode 1</td><td class="align_center">Mode 2</td><td class="align_center">Mode 3</td><td class="align_center">Mode 4</td><td class="align_center">Mode 5</td></tr><tr><td class="thead-hr" colspan="6"><hr/></td></tr><tr><td class="align_left">Natural frequencies (<span class="nowrap"><svg height="8.57479pt" id="M53" style="vertical-align:-0.04981041pt" version="1.1" viewbox="-0.0498162 -8.52498 15.445 8.57479" width="15.445pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M729 650H468V622C546 615 554 610 554 527V365H213V527C213 610 221 616 297 622V650H38V622C120 616 128 611 128 527V123C128 39 120 34 40 28V0H303V28C221 34 213 40 213 123V322H554V123C554 39 546 34 460 28V0H728V28C647 34 639 39 639 123V527C639 610 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<div>First five natural frequencies obtained for the MEMS-scale bistable energy harvester.</div>

Shock and Vibration

tab1

Table 1

Table 1: Snap-Through and Mechanical Strain Analysis of a MEMS Bistable Vibration Energy Harvester 