Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope

Table 1

Physical parameters of the 4-DOF MVG.

Mass	Value (kg)	Damping	Value (Ns/m)	Stiffness coefficient	Value (N/m)
					224.7
					8.2
					313.8
					260.9
—	—				9.5
—	—				123.7