Dynamic Modeling and Active Vibration Isolation of a Noncontact 6-DOF Lorentz Platform Based on the Exponential Convergence Disturbance Observer

Figure 11

Comparison of PID control and slip mode control force input: (a) , (b) , (c) , (d) , (e) , and (f) .

(a)

(b)

(c)

(d)

(e)

(f)