A Longitudinal-Bending Hybrid Linear Ultrasonic Motor and Its Driving Characteristic

<div>Variation of modal frequencies with main structural parameters of the stator. (a) Slot depth <span class="nowrap"><svg height="9.49473pt" id="M11" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 3.60972 9.49473" width="3.60972pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M238 681C243 705 239 712 230 712C217 712 156 682 75 674L70 648H105C148 648 153 641 144 598L39 110C18 11 35 -12 55 -12C90 -12 166 36 221 103L205 125C174 93 130 65 118 65C112 65 108 68 114 96L238 681Z"></path></g></svg>.</span> (b) Slot width <span class="nowrap"><svg height="6.1673pt" id="M12" style="vertical-align:-0.2063904pt" version="1.1" viewbox="-0.0498162 -5.96091 9.39034 6.1673" width="9.39034pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M689 332C689 394 670 448 646 448C620 448 597 421 597 396C597 386 600 381 608 372C619 359 620 334 620 315C620 150 538 45 454 45C414 45 386 67 386 122C386 138 388 158 394 180L457 426L452 432L377 416L315 156C302 100 259 45 216 45C176 45 148 67 148 122C148 133 152 158 156 180C162 212 173 259 194 332C201 357 206 384 206 405C206 430 198 448 174 448C125 448 66 406 23 342L43 319C84 368 110 383 121 383C126 383 128 382 128 377C128 370 127 359 122 343C99 268 84 204 77 156C74 137 70 111 70 104C70 25 125 -12 180 -12C228 -12 276 12 319 50C338 8 378 -12 418 -12C549 -12 689 166 689 332Z"></path></g></svg>.</span> (c) Stator length of the middle part <span class="nowrap"><svg height="9.49473pt" id="M13" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 7.34169 9.49473" width="7.34169pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M530 686C535 705 530 712 521 712C504 712 448 684 359 674L358 648H393C437 648 439 646 429 593L400 435C372 447 345 448 332 448C286 448 194 414 144 373C68 311 23 203 23 111C23 26 57 -12 91 -12C120 -12 147 3 188 29C227 54 290 102 341 170H343L322 71C308 6 320 -12 341 -12C373 -12 442 27 501 96L485 120C455 91 422 67 408 67C401 67 401 76 404 91C440 294 479 473 530 686ZM387 375L355 241C326 187 200 53 142 53C126 53 109 73 109 130C109 217 154 337 218 381C240 396 265 404 297 404S372 390 387 375Z"></path></g></svg>.</span></div>

Shock and Vibration

fig6

Figure 6

Figure 6: A Longitudinal-Bending Hybrid Linear Ultrasonic Motor and Its Driving Characteristic 