Capacitance-Based Frequency Adjustment of Micro Piezoelectric Vibration Generator

Figure 4

Schemes of the piezoelectric generator based on capacitor FM.

(a) Regulation layer locates at top and substrate locates at bottom

(b) Regulation layer locates in the middle and substrate locates at bottom

(c) Regulation layer locates at top and substrate locates in the middle

(d) Regulation layer locates at bottom and substrate locates in the middle