Design and Simulation of Capacitive MEMS Switch for Ka Band Application

Table 2

Specific parameters of the proposed MEMS switch.

Parameters	Value
Beam length ()	400 μm
Beam width ()	120 μm
Center conductor width ()	120 μm
Overlap area ()
Dielectric material and constant	AIN &11
Beam thickness ()	1 μm
Beam material	Gold
Dielectric thickness ()	0.1 μm
Air-gap ()	2.5 μm
Substrate thickness ()
CPW dimension	G/W/G-90 μm/120 μm/90 μm
CPW thickness	1 μm