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Shock and Vibration
/
2024
/
Article
/
Tab 1
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Research Article
Nonlinear Displacement of the Electrothermal V-Shaped Actuator
Table 1
Geometry dimensions of EVA.
L
(
μ
m)
h
(
μ
m)
(
μ
m)
(
μ
m)
θ
(°)
n
750
30
6
4
2
10