Nonlinear Displacement of the Electrothermal V-Shaped Actuator

Table 2

Material parameters of silicon.

d (kg/m^3)	E (GPa)	(W/m·K)	(J/kg·K)	(Ω·m)	λ (1/K)
2330	169	0.0257	712	148 × 10^−6	1.25 × 10^−3